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AES Investigation of Inhomogenous Metal-Insulator Samples
Published online by Cambridge University Press: 15 November 2005
Abstract
In this article, the secondary electron-emission properties of both vertically and laterally inhomogeneous samples are discussed. To study the effect of surface coverage, the total electron-emission yield of tungsten and niobium samples was measured as a function of primary electron energy and oxide thickness. A method is suggested to avoid charging difficulties during AES measurements of samples that consist of both metal and various insulator parts.
- Type
- Papers from the European Microbeam Analysis Society Regional Workshop in Bled, Slovenia
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- © 2005 Microscopy Society of America
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