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AFM Analysis of Gas Cluster Ion Impact Craters and Smoothing

Published online by Cambridge University Press:  01 November 2002

Christopher Santeufemio
Christopher Santeufemio*
Affiliation:
Epion Corporation, 37 Manning Road, Billerica, MA 01821

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1138 - 1139
Copyright
Copyright © Microscopy Society of America 2002