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An Integrated in SEM Multi-Purpose AFM Instrument Utilizing an Active Cantilever

Published online by Cambridge University Press:  05 August 2019

Mathias Holz ,
Alexander Reum ,
Ahmad Ahmad ,
Tzvetan Ivanov ,
Christoph Reuter ,
Martin Hofmann  and
Ivo W. Rangelow
Mathias Holz*
Affiliation:
Nano Analytik GmbH, Ilmenau, Germany.
Alexander Reum
Affiliation:
Technische Universität Ilmenau, Ilmenau, Germany.
Ahmad Ahmad
Affiliation:
Nano Analytik GmbH, Ilmenau, Germany. Technische Universität Ilmenau, Ilmenau, Germany.
Tzvetan Ivanov
Affiliation:
Nano Analytik GmbH, Ilmenau, Germany.
Christoph Reuter
Affiliation:
Technische Universität Ilmenau, Ilmenau, Germany.
Martin Hofmann
Affiliation:
Nano Analytik GmbH, Ilmenau, Germany.
Ivo W. Rangelow
Affiliation:
Nano Analytik GmbH, Ilmenau, Germany.
*
*Corresponding author: m.holz@nanoanalytik.net

Abstract

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Type
Microscopy and Microanalysis for Real-World Problem Solving
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 806 - 807
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Rangelow, IW et al. , Device and Method for Mask-less AFM Microlithography, U.S. patent 7,141,808 (2005).Google Scholar
[2]Rangelow, IW et al. , Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement and Phenomena 35 (2017), p. 06G101. doi.org/10.1116/1.4992073Google Scholar
[3]Rangelow, IW et al. , Journal of Vacuum Science & Technology B 36 (2018), p. 06J102. doi: 10.116/1.5048524Google Scholar