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Application of Electron Holography to Semiconductor Structures and Devices

Published online by Cambridge University Press:  01 August 2010

MA Gribelyuk ,
V Ontalus ,
KT Schonenberg ,
J Yuan ,
TN Adam  and
P Ronsheim
MA Gribelyuk
Affiliation:
IBM Systems and Technology Group
V Ontalus
Affiliation:
IBM Systems and Technology Group
KT Schonenberg
Affiliation:
IBM Systems and Technology Group
J Yuan
Affiliation:
IBM Systems and Technology Group
TN Adam
Affiliation:
IBM Systems and Technology Group
P Ronsheim
Affiliation:
IBM Systems and Technology Group

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 568 - 569
Copyright
Copyright © Microscopy Society of America 2010