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The Application of Low Energy Scanning-Transmission Electron Microscopy (LVSTEM) to the Study of Semiconductor Materials and Devices

Published online by Cambridge University Press:  21 July 2003

Bryan Tracy
Bryan Tracy*
Affiliation:
Advanced Micro Devices, Sunnyvale, Ca, 94088

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 20 - 21
Copyright
Copyright © Microscopy Society of America 2003