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Automated Inclusion Microanalysis in Steel by Computer-Based Scanning Electron Microscopy: Accelerating Voltage, Backscattered Electron Image Quality, and Analysis Time

Published online by Cambridge University Press:  10 November 2017

Dai Tang
Affiliation:
Department of Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Avenue, Pittsburgh, PA 15213, USA
Mauro E. Ferreira
Affiliation:
Department of Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Avenue, Pittsburgh, PA 15213, USA
Petrus C. Pistorius*
Affiliation:
Department of Materials Science and Engineering, Carnegie Mellon University, 5000 Forbes Avenue, Pittsburgh, PA 15213, USA
*
*Corresponding author. pistorius@cmu.edu
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Abstract

Automated inclusion microanalysis in steel samples by computer-based scanning electron microscopy provides rapid quantitative information on micro-inclusion distribution, composition, size distribution, morphology, and concentration. Performing the analysis at a lower accelerating voltage (10 kV), rather than the generally used 20 kV, improves analysis accuracy and may improve spatial resolution, but at the cost of a smaller backscattered electron signal and potentially smaller rate of generation of characteristic X-rays. These effects were quantified by simulation and practical measurements.

Type
Materials Science Applications
Copyright
© Microscopy Society of America 2017 

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