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Automated Local Texture and Stress Analysis in Cu Interconnects Using D-STEM and Precession Microscopy

Published online by Cambridge University Press:  01 August 2010

KJ Ganesh ,
S Rajasekhara ,
D Bultreys ,
J-P Zhou  and
PJ Ferreira
KJ Ganesh
Affiliation:
University of Texas, Austin
S Rajasekhara
Affiliation:
University of Texas, Austin
D Bultreys
Affiliation:
NanoMEGAS SPRL, Belgium
J-P Zhou
Affiliation:
University of Texas, Austin
PJ Ferreira
Affiliation:
University of Texas, Austin

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 1728 - 1729
Copyright
Copyright © Microscopy Society of America 2010