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Automated Sample Preparation of Low-k Dielectrics for FESEM

Published online by Cambridge University Press:  01 August 2005

R R Cerchiara ,
P E Fischione ,
J J Gronsky ,
J M Matesa ,
A C Robins ,
D W Smith ,
S J Rozeveld ,
C Wood ,
E Beach  and
J Waeterloos
R R Cerchiara
Affiliation:
E.A. Fischione Instruments
P E Fischione
Affiliation:
E.A. Fischione Instruments
J J Gronsky
Affiliation:
E.A. Fischione Instruments
J M Matesa
Affiliation:
E.A. Fischione Instruments
A C Robins
Affiliation:
E.A. Fischione Instruments
D W Smith
Affiliation:
E.A. Fischione Instruments
S J Rozeveld
Affiliation:
The Dow Chemical Company
C Wood
Affiliation:
The Dow Chemical Company
E Beach
Affiliation:
The Dow Chemical Company
J Waeterloos
Affiliation:
The Dow Chemical Company

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 2108 - 2109
Copyright
© 2005 Microscopy Society of America