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Challenges and Opportunities in 3D Tri-gate Transistor Characterization
Published online by Cambridge University Press: 23 September 2015
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- Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2333 - 2334
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- Copyright © Microscopy Society of America 2015
References
References:
[3]
Thevenaz, P, et al, IEEE Transaction on Image Processing volume 7 (1998). p. 27.CrossRefGoogle Scholar
[5] ORTEM lab engineers and artists are gratefully acknowledged for the TEM works to support the 22nm tri-gate technology.Google Scholar
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