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Characterizing Texture and Grain Boundaries in Nanoscale Cu Interconnects by Precession Electron Diffraction

Published online by Cambridge University Press:  08 April 2017

K Ganesh ,
A Darbal ,
S Rajasekhara ,
G Rohrer ,
K Barmak  and
P Ferreira
K Ganesh
Affiliation:
University of Texas, Austin
A Darbal
Affiliation:
Carnegie Mellon University
S Rajasekhara
Affiliation:
University of Texas, Austin
G Rohrer
Affiliation:
Carnegie Mellon University
K Barmak
Affiliation:
Carnegie Mellon University
P Ferreira
Affiliation:
University of Texas, Austin

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 1346 - 1347
Copyright
Copyright © Microscopy Society of America 2011