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A Comparison of Oxide Thickness Measurements of Uranium Dioxide and Tantalum Pentoxide Using Both User-Acquired and Built-In EDS Standards

Published online by Cambridge University Press:  27 August 2014

C. Poulter
Affiliation:
AWE, Reading, Berkshire, United Kingdom RG74PR, Tel +44 01189 824858
C. Lang
Affiliation:
Oxford Instruments Nano analysis, High Wycombe, Buckinghamshire, United Kingdom HP12 3SE, Tel 01494 442255

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2014 

References

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