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Cr(Al)N/Al2O3 nanocomposite coatings fabricated by differential pumping cosputtering

Published online by Cambridge University Press:  23 September 2015

Masahiro Kawasaki ,
Masateru Nose ,
Ichiro Onishi ,
Kenji Matsuda  and
Makoto Shiojiri
Masahiro Kawasaki
Affiliation:
JEOL USA Inc., 11 Dearborn Road, Peabody, MA 01960, USA.
Masateru Nose
Affiliation:
Faculty of Art and Design, University of Toyama, Takaoka, Toyama 933-8588, Japan.
Ichiro Onishi
Affiliation:
JEOL Ltd. 3-1-2 Musashino, Akishima, Tokyo 196-8558, Japan
Kenji Matsuda
Affiliation:
School of Science and Engineering, University of Toyama, Toyama 930-8555, Japan
Makoto Shiojiri
Affiliation:
School of Science and Engineering, University of Toyama, Toyama 930-8555, Japan Kyoto Institute of Technology, Kyoto 606-8585, Japan.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1027 - 1028
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Nose, M., et al, J. Vac. Sci. Technol. A 30 (2012) 011502.CrossRefGoogle Scholar
[2] Kawasaki, M., et al, ACS Appl. Mater. Interfaces 5 (2013) 3833.CrossRefGoogle Scholar
[3] Kawasaki, M., et al, Appl. Phys. Lett 103 (2013) 201913.CrossRefGoogle Scholar
[4] Kawasaki, M., et al, M&M 2014). Abstract, Hartford CT 0383–000160.Google Scholar