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Creation and Characterization of an Atomically Sharp Single/Trimer Atom Ir/W(111) Tip by Thermal Field-Assisted Faceting

Published online by Cambridge University Press:  23 July 2021

Kwang-Il Kim ,
Junhyeok Hwang ,
Min-Wook Pin ,
Jihwan Kwon ,
Ha Rim Lee  and
In-Yong Park
Kwang-Il Kim
Affiliation:
Scientific Instruments Platform Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea Major in NanoScience, University of Science and Technology, 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea
Junhyeok Hwang
Affiliation:
Scientific Instruments Platform Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea Major in NanoScience, University of Science and Technology, 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea
Min-Wook Pin
Affiliation:
Advanced Process and Materials R&D Group, Korea Institute of Industrial Technology (KITECH), 156 Gaetbeol-ro, Yeonsu-gu, Incheon 21999, South Korea
Jihwan Kwon
Affiliation:
EM Nanometrology Team, Interdisciplinary Materials Measurement Institute, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea
Ha Rim Lee
Affiliation:
EM Nanometrology Team, Interdisciplinary Materials Measurement Institute, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea
In-Yong Park*
Affiliation:
Scientific Instruments Platform Team, Advanced Instrumentation Institute, Korea Research Institute of Standards and Science (KRISS), 267 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea Major in NanoScience, University of Science and Technology, 217 Gajeong-ro, Yuseong-gu, Daejeon 34113, South Korea
*
*Corresponding author: In-Yong Park, E-mail: inyong.park@kriss.re.kr
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Abstract

Atomically sharpened tips have attracted much interest in the imaging and manufacturing fields due to their high spatial resolutions. Typically, tungsten (W) is mainly used as the material of such a tip, but when the W tip is used in an oxygen environment, a limit is revealed due to corrosiveness stemming from a reaction with the oxygen gas. To solve this problem, methods of depositing a metal on W that does not react with oxygen have been studied. In this study, we introduce a method of depositing iridium (Ir) directly onto an insulating layer without an additional pretreatment to remove the insulating layer remaining on the W surface, forming an Ir-nanopyramid structure at the apex of the W tip by field evaporation and faceting. Field ion microscopy and atom probe tomography were used to analyze the crystal structure and composition at the apex during the faceting process, and the overall tip shape change after faceting was compared and analyzed with transmission electron microscopy. The proposed method does not have a tip heating step when creating an atomically sharp tip such that it can be made easily with a simpler equipment configuration than in the existing method.

Keywords

facetingfield ion microscopyIr/W(111)single-atom tiptransmission electron microscopy
Type
Materials Science Applications
Information
Microscopy and Microanalysis , Volume 27 , Issue 5 , October 2021 , pp. 1017 - 1025
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

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