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A Dedicated Backscattered Electron Detector for High Speed Imaging and Defect Inspection

Published online by Cambridge University Press:  04 August 2017

Maximilian Schmid ,
Andreas Liebel ,
Robert Lackner ,
Daniel Steigenhöfer ,
Adrian Niculae  and
Heike Soltau
Maximilian Schmid
Affiliation:
PNDetector GmbH, München, Germany
Andreas Liebel
Affiliation:
PNDetector GmbH, München, Germany
Robert Lackner
Affiliation:
PNDetector GmbH, München, Germany
Daniel Steigenhöfer
Affiliation:
PNDetector GmbH, München, Germany
Adrian Niculae
Affiliation:
PNDetector GmbH, München, Germany
Heike Soltau
Affiliation:
PNDetector GmbH, München, Germany

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 10 - 11
Copyright
© Microscopy Society of America 2017