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A Dedicated Multi-Beam SEM for Transmission Imaging of Thin Samples

Published online by Cambridge University Press:  05 August 2019

Pieter Kruit  and
Wilco Zuidema
Pieter Kruit*
Affiliation:
Delft University of Technology, Department of Imaging Physics, Delft, The Netherlands.
Wilco Zuidema
Affiliation:
Delft University of Technology, Department of Imaging Physics, Delft, The Netherlands.
*
*Corresponding author: p.kruit@tudelft.nl

Abstract

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Type
Multi-Modal, Large-Scale and 3D Correlative Microscopy
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 1034 - 1035
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Zhang, Y., Mohammadi-Gheidari, A. and Ren, Y., PhD theses Delft University of Technology.Google Scholar
[2]Eberle, A. et al. , J Microsc. 259 (2015), p. 114.Google Scholar
[3]Zonnevylle, AC et al. , J Microsc. 251 (2013), p. 58.Google Scholar
[4]Ren, Y and Kruit, P, Journal of Vacuum Science & Technology B, 34.6 (2016), p. 06KF02.Google Scholar
[7]This work is a cooperation between Delft University, Thermo Fischer Scientific, Delmic and Technolution.Google Scholar