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Detailed In Situ Observations of Electromigration in Aluminum Wires
Published online by Cambridge University Press: 04 August 2017
Abstract
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- Abstract
- Information
- Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1450 - 1451
- Copyright
- © Microscopy Society of America 2017
References
[5] This work was supported by FAME, one of six centers of STARnet, a Semiconductor Research Corporation program sponsored by MARCO and DARPA, by National Science Foundation (NSF) award DMR-1611036, and by NSF STC award DMR-1548924. Data presented were acquired at the Center for Electron Microscopy and Microanalysis at the University of Southern California. D. R. G. Mitchell’s “Apply CLUT” script was used to make the intensity scale bar in Figure 1.Google Scholar