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Developments in sample preparation of advanced semiconductor devices from the bulk to nanometer-length scales

Published online by Cambridge University Press:  30 July 2021

Cecile Bonifacio ,
Clive Downing ,
Pawel Nowakowski ,
Richard Li ,
Mary Ray  and
Paul Fischione
Cecile Bonifacio
Affiliation:
E.A. Fischione Instruments, Inc., United States
Clive Downing
Affiliation:
The Advanced Microscopy Laboratory, CRANN, Trinity College Dublin, Dublin, Ireland, United States
Pawel Nowakowski
Affiliation:
E.A. Fischione Instruments, Inc., United States
Richard Li
Affiliation:
E.A. Fischione Instruments, Inc., United States
Mary Ray
Affiliation:
E.A. Fischione Instruments, Inc., United States
Paul Fischione
Affiliation:
E.A. Fischione Instruments, Inc., United States

Abstract

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Type
Vendor Symposium
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 1078 - 1080
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

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