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Direct Observation of the Surface Topography at High Temperature with SEM

Published online by Cambridge University Press:  03 April 2020

Renaud Podor Open the ORCID record for Renaud Podor [Opens in a new window] ,
Xavier Le Goff ,
Joseph Lautru ,
Henri-Pierre Brau ,
Mathias Barreau ,
Xavier Carrier ,
Jerôme Mendonça ,
Dorian Nogues  and
Antoine Candeias
Renaud Podor*
Affiliation:
ICSM, CEA, CNRS, ENSCM, Univ Montpellier, Marcoule, France
Xavier Le Goff
Affiliation:
ICSM, CEA, CNRS, ENSCM, Univ Montpellier, Marcoule, France
Joseph Lautru
Affiliation:
ICSM, CEA, CNRS, ENSCM, Univ Montpellier, Marcoule, France
Henri-Pierre Brau
Affiliation:
ICSM, CEA, CNRS, ENSCM, Univ Montpellier, Marcoule, France
Mathias Barreau
Affiliation:
Sorbonne Université, CNRS, Laboratoire de Réactivité de Surface, F-75252Paris, France
Xavier Carrier
Affiliation:
Sorbonne Université, CNRS, Laboratoire de Réactivité de Surface, F-75252Paris, France
Jerôme Mendonça
Affiliation:
ICSM, CEA, CNRS, ENSCM, Univ Montpellier, Marcoule, France NewTEC Scientific, 285 Rue Gilles Roberval, 30900 Nîmes, France
Dorian Nogues
Affiliation:
NewTEC Scientific, 285 Rue Gilles Roberval, 30900 Nîmes, France
Antoine Candeias
Affiliation:
NewTEC Scientific, 285 Rue Gilles Roberval, 30900 Nîmes, France
*
*Author for correspondence: Renaud Podor, E-mail: renaud.podor@cea.fr
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Abstract

High-temperature scanning electron microscopy allows the direct study of the temperature behavior of materials. Using a newly developed heating stage, tilted images series were recorded at high temperature and 3D images of the sample surface were reconstructed. By combining 3D images recorded at different temperatures, the variations of material roughness can be accurately described and associated with local changes in the topography of the sample surface.

Keywords

3D surface reconstructionhigh temperatureSEMtopography
Type
Software and Instrumentation
Information
Microscopy and Microanalysis , Volume 26 , Issue 3 , June 2020 , pp. 397 - 402
Copyright
Copyright © Microscopy Society of America 2020

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