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Dynamic Charging in the Low Voltage SEM

Published online by Cambridge University Press:  08 August 2003

David C. Joy  and
Carolyn S. Joy
David C. Joy
Affiliation:
F239 Walters Life Sciences Bldg., University of Tennessee, Knoxville, TN 37996-0810 Oak Ridge National Laboratories
Carolyn S. Joy
Affiliation:
F239 Walters Life Sciences Bldg., University of Tennessee, Knoxville, TN 37996-0810
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Abstract

Dynamic charging is the condition in which the magnitude of the charge on the surface of a non-conductor, such as a polymer, under electron irradiation appears to change with the incident current density. Measurements confirm that this effect does occur and show that the magnitude of the effect depends on the relationship between the incident beam energy and the energy (E2) at which the sample has a total electron yield of unity. The effect arises from changes in the leakage resistance of the sample, and two possible explanations for this behavior are suggested.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 1 , Issue 3 , June 1995 , pp. 109 - 112
Copyright
© 1995 Microscopy Society of America

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Footnotes

Revised version of an article published earlier in Microscopy: The Key Research Tool.