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Electron Tomography of Microelectronic Devices

Published online by Cambridge University Press:  22 July 2003

K.-H. Min  and
J. Mardinly
K.-H. Min
Affiliation:
Department of Materials Science and Engineering, Stanford University, Stanford, CA 9430
J. Mardinly
Affiliation:
Materials Technology, Intel Corp., Santa Clara, CA 9505

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 502 - 503
Copyright
Copyright © Microscopy Society of America 2003