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Electron-beam deposition of metals for mask repair

Published online by Cambridge University Press:  24 July 2003

Young Choi  and
David C Joy
Young Choi
Affiliation:
EM Facility, University of Tennessee, Knoxville, TN 37996-0840
David C Joy
Affiliation:
EM Facility, University of Tennessee, Knoxville, TN 37996-0840 Oak Ridge National Laboratory, Oak Ridge, TN 37831-6064

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 984 - 985
Copyright
Copyright © Microscopy Society of America 2003