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Etching Dynamics of Geometrically Confined Silicon Nanostructure

Published online by Cambridge University Press:  22 July 2022

Kunmo Koo ,
Joon Ha Chang ,
Sanghyeon Ji ,
Jacob Choe ,
Seungmin Shin ,
Geun-Taek Lee ,
Tae-Hong Kim  and
Jong Min Yuk
Kunmo Koo
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
Joon Ha Chang
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
Sanghyeon Ji
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
Jacob Choe
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
Seungmin Shin
Affiliation:
Advanced Core Equipment Engineering & Development P/J, Semiconductor R&D Center, Samsung Electronics, Hwaseong, Republic of Korea
Geun-Taek Lee
Affiliation:
Advanced Core Equipment Engineering & Development P/J, Semiconductor R&D Center, Samsung Electronics, Hwaseong, Republic of Korea
Tae-Hong Kim
Affiliation:
Advanced Core Equipment Engineering & Development P/J, Semiconductor R&D Center, Samsung Electronics, Hwaseong, Republic of Korea
Jong Min Yuk*
Affiliation:
Department of Materials Science and Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea
*
*Corresponding author: jongmin.yuk@kaist.ac.kr

Abstract

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Type
Beyond Visualization with In Situ and Operando TEM
Information
Microscopy and Microanalysis , Volume 28 , Supplement S1 , August 2022 , pp. 126 - 127
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Copyright
Copyright © Microscopy Society of America 2022

Footnotes

†

Current affiliation: Department of Materials Science and Engineering, Northwestern University, Evanston, IL, United States.

‡

Current affiliation: Cathode Materials Research Group, Research Institute of Industrial Science and Technology (RIST), Incheon, Republic of Korea.

References

Pinion, C. W. et al. , Journal of Materials Chemistry C 4 (2016), p. 3890.CrossRefGoogle Scholar
Gosálvez, M. A., et al. , Handbook of Silicon Based MEMS and Technologies: Second Edition (2015), p. 470.CrossRefGoogle Scholar
Ross, F. M. et al. , Science 350 (2015), aaa9886.CrossRefGoogle Scholar
Aabdin, Z. et al. , Nano Letters 17 (2017), p. 2953.CrossRefGoogle Scholar