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Evaluation of Confocal X-ray Analysis for Single-Atom Detection in a Thin Specimen by an Advanced Analytical Electron Microscope

Published online by Cambridge University Press:  30 July 2020

Masashi Watanabe  and
Ray Egerton
Masashi Watanabe
Affiliation:
Lehigh University, Bethlehem, Pennsylvania, United States
Ray Egerton
Affiliation:
Department of Physics, University of Alberta, Edmonton, Alberta, Canada

Abstract

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Type
Pushing the Limits of Detection in Quantitative (S)TEM Imaging, EELS, and EDX
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 1512 - 1514
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Copyright
Copyright © Microscopy Society of America 2020

References

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