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Evaluation of Gallium Ion\Xe Plasma Beam for Patterning of Suspended Silicon Nitride Membranes

Published online by Cambridge University Press:  30 July 2021

Shuai Jiang ,
Tugba Isik ,
Ceren Yilmaz Akkaya ,
Suman Kumari  and
Volkan Ortalan
Shuai Jiang
Affiliation:
Department of Materials Science and Engineering, University of Connecticut, United States
Tugba Isik
Affiliation:
School of Mechanical Engineering, Purdue University, United States
Ceren Yilmaz Akkaya
Affiliation:
Department of Materials Science and Engineering, University of Connecticut, Storrs, Connecticut, United States
Suman Kumari
Affiliation:
Department of Materials Science and Engineering, University of Connecticut, United States
Volkan Ortalan
Affiliation:
Department of Materials Science and Engineering, University of Connecticut, United States

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in and Materials and Life Sciences
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 438 - 439
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Kuiper, S., Van Rijn, C. J. M., Nijdam, W., and Elwenspoek, M. C., “Development and applications of very high flux microfiltration membranes,” J. Memb. Sci., vol. 150, no. 1, pp. 1–8, 1998.CrossRefGoogle Scholar
Karawdeniya, B. I., Bandara, Y. M. N. D. Y., Nichols, J. W., Chevalier, R. B., and Dwyer, J. R., “Surveying silicon nitride nanopores for glycomics and heparin quality assurance,” Nat. Commun., vol. 9, no. 1, pp. 1–8, 2018.Google ScholarPubMed
Dwyer, J. R. and Harb, M., “Through a Window, Brightly: A Review of Selected Nanofabricated Thin-Film Platforms for Spectroscopy, Imaging, and Detection,” Appl. Spectrosc., vol. 71, no. 9, pp. 2051–2075, 2017.CrossRefGoogle Scholar
Sheetz, B. S., Bandara, Y. M. N. D. Y., Rickson, B., Auten, M., and Dwyer, J. R., “Rapid, General-Purpose Patterning of Silicon Nitride Thin Films Under Ambient Conditions for Applications Including Fluid Channel and SERS Substrate Formation,” ACS Appl. Nano Mater., vol. 3, no. 3, pp. 2969–2977, 2020.Google Scholar
Peltonen, A., Nguyen, H. Q., Muhonen, J. T., and Pekola, J. P., “Milling a silicon nitride membrane by focused ion beam,” J. Vac. Sci. Technol. B, Nanotechnol. Microelectron. Mater. Process. Meas. Phenom., vol. 34, no. 6, p. 062201, 2016.Google Scholar
Vijayan, S., Jinschek, J. R., Kujawa, S., Greiser, J., and Aindow, M., “Focused Ion Beam Preparation of Specimens for Micro-Electro-Mechanical System-based Transmission Electron Microscopy Heating Experiments,” Microsc. Microanal., vol. 23, no. 4, pp. 708–716, 2017.CrossRefGoogle ScholarPubMed
Mele, L. et al. , “A MEMS-based heating holder for the direct imaging of simultaneous in-situ heating and biasing experiments in scanning/transmission electron microscopes,” Microsc. Res. Tech., vol. 79, no. 4, pp. 239–250, 2016.CrossRefGoogle ScholarPubMed