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Fabrication and Characterization of Ultra-High Aspect Ratio Features in Gold Using the Helium Ion Microscope

Published online by Cambridge University Press:  01 August 2010

VS Smentkowski ,
R Potyrailo ,
L Scipioni  and
D Ferranti
VS Smentkowski
Affiliation:
General Electric
R Potyrailo
Affiliation:
General Electric
L Scipioni
Affiliation:
Carl Zeiss SMT Inc
D Ferranti
Affiliation:
Carl Zeiss SMT Inc

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 198 - 199
Copyright
Copyright © Microscopy Society of America 2010