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FIB Dual-Beam Sample Preparation for TEM Observation

Published online by Cambridge University Press:  24 July 2003

Geoffroy Auvert
Geoffroy Auvert*
Affiliation:
STMicroelectronics, CEA-LETI-SCPC, 17 rue des martyrs, 38054 Grenoble, Cedex, France

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 870 - 871
Copyright
Copyright © Microscopy Society of America 2003