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FIB Micro-Pillar Sampling Technique For 3D Stem Observation And Its Application

Published online by Cambridge University Press:  06 August 2003

T. Yaguchi ,
M. Konno ,
T. Kamino ,
T. Hashimoto ,
T. Onishi ,
K. Umemura  and
K. Asayama
T. Yaguchi
Affiliation:
Hitachi Science Systems Ltd., 11-1 Ishikawa-cho, Hitachinaka, Ibaraki, 312-0057 Japan
M. Konno
Affiliation:
Hitachi Science Systems Ltd., 11-1 Ishikawa-cho, Hitachinaka, Ibaraki, 312-0057 Japan
T. Kamino
Affiliation:
Hitachi Science Systems Ltd., 11-1 Ishikawa-cho, Hitachinaka, Ibaraki, 312-0057 Japan
T. Hashimoto
Affiliation:
Hitachi High-Technologies Corp., 882 Ichige, Hitachinaka, Ibaraki, 312-8504 Japan
T. Onishi
Affiliation:
Hitachi High-Technologies Corp., 882 Ichige, Hitachinaka, Ibaraki, 312-8504 Japan
K. Umemura
Affiliation:
Central Research laboratory Hitachi Ltd. 1-180 Higashikoigakubo, Kokubunji, Tokyo, 185-8601 Japan
K. Asayama
Affiliation:
Semiconductor and Integrated Circuits Division, Hitachi Ltd., 20-1 Josuihon-cho 5, Kodaira, Tokyo 187-8588 Japan

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 118 - 119
Copyright
Copyright © Microscopy Society of America 2003