Hostname: page-component-5c6d5d7d68-sv6ng Total loading time: 0 Render date: 2024-09-01T09:23:38.773Z Has data issue: false hasContentIssue false
  • English
  • Français

FIB Preparation of Mesa Structures for SIMS Analysis

Published online by Cambridge University Press:  01 August 2002

J. M. McKinley ,
B. B. Rossie ,
M. A. Decker  and
F. A. Stevie
J. M. McKinley
Affiliation:
Agere Systems, 9333 S. John Young Parkway, Orlando, FL 32836
B. B. Rossie
Affiliation:
Agere Systems, 9333 S. John Young Parkway, Orlando, FL 32836
M. A. Decker
Affiliation:
Agere Systems, 9333 S. John Young Parkway, Orlando, FL 32836
F. A. Stevie
Affiliation:
North Carolina State University, 1010 Main Campus Drive, Box 7531, Raleigh, NC 27695

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 542 - 543
Copyright
Copyright © Microscopy Society of America 2002