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FIB sample preparation for X-ray microscopy and ROI target cross-sectioning

Published online by Cambridge University Press:  25 July 2016

Ehrenfried Zschech
Affiliation:
Fraunhofer Institute for Ceramic Technologies and Systems, Department Nanoelectronic Materials and Nanoanalysis, Dresden, Germany
Jürgen Gluch
Affiliation:
Fraunhofer Institute for Ceramic Technologies and Systems, Department Nanoelectronic Materials and Nanoanalysis, Dresden, Germany
Rüdiger Rosenkranz
Affiliation:
Fraunhofer Institute for Ceramic Technologies and Systems, Department Nanoelectronic Materials and Nanoanalysis, Dresden, Germany
Yvonne Standke
Affiliation:
Fraunhofer Institute for Ceramic Technologies and Systems, Department Nanoelectronic Materials and Nanoanalysis, Dresden, Germany
Sven Niese
Affiliation:
Fraunhofer Institute for Ceramic Technologies and Systems, Department Nanoelectronic Materials and Nanoanalysis, Dresden, Germany now with AXO Dresden GmbH, Dresden, Germany

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2016 

References

References:

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