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Focused Ion Beam Induced X-Ray Analysis

Published online by Cambridge University Press:  01 August 2005

L A Giannuzzi
Affiliation:
FEI Company, Hillsboro, Oregon

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Copyright
© 2005 Microscopy Society of America