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Focused Ion Beams of Xe+, Ar+, O+, and N+: Sputter Rate Trends, Chemical Interactions, and Emerging Applications
Published online by Cambridge University Press: 05 August 2019
Abstract
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- Type
- Advances in Focused Ion Beam Instrumentation and Techniques
- Information
- Copyright
- Copyright © Microscopy Society of America 2019
References
[3]ThermoFisher Scientific Electron Microscopy Solutions, https://www.fei.com/products/dualbeam/helios-nanolab/ (accessed 2/21/2019).Google Scholar
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