Ga+ and Xe+ FIB Milling and Measurement of FIB Damage in Aluminum

Brandon Van Leer; Arda Genc; Rick Passey

doi:10.1017/S1431927617002161

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References

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[2] Presley, M. in "The Formation of Amorphous and Crystalline Damage in Metallic and Semiconducting Materials under Gallium Ion Irradiation", Ohio State University Doctoral Dissertation, (2016) p 80.Google Scholar

[3] Ziegler, JF & Biersack, JP SRIM 2003, www.SRIM.com.Google Scholar

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Ga+ and Xe+ FIB Milling and Measurement of FIB Damage in Aluminum

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