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Hardware and Software Advances in Commercially Available Atom Probe Tomography Systems

Published online by Cambridge University Press:  04 August 2017

Robert M. Ulfig ,
Ty J. Prosa ,
Yimeng Chen ,
Katherine P. Rice ,
Isabelle. Martin ,
David A. Reinhard ,
Brian P. Gieser ,
Edward Oltman ,
Dan R. Lenz  and
Joseph Bunton
...Show all authors
Robert M. Ulfig
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Ty J. Prosa
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Yimeng Chen
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Katherine P. Rice
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Isabelle. Martin
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
David A. Reinhard
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Brian P. Gieser
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Edward Oltman
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Dan R. Lenz
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Joseph Bunton
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Michael Van Dyke
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
Thomas F. Kelly
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.
David J. Larson
Affiliation:
CAMECA Instruments, Inc., 5470 Nobel Drive, Madison, WI, USA.

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 40 - 41
Copyright
© Microscopy Society of America 2017 

References

[1] Larson, D.J., et al, Local Electrode Atom Probe Tomography. Springer New York 2013.Google Scholar
[2] Rice, K.P., et al, Microscopy and Microanalysis 22(3 2016). p 583.Google Scholar
[3] Vurpillot, F., et al, Semiconductor Science and Technology 31(7 2016). p 074002.Google Scholar
[4] Geiser, B., et al These Proceedings (2017).Google Scholar