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Improved Z-axis Resolution in Serial Block Face SEM with Dual Primary Energies and Monte Carlo Simulation of Electron Scattering

Published online by Cambridge University Press:  01 August 2018

Q. He ,
D.C. Joy ,
G. Zhang  and
R.D. Leapman
Q. He
Affiliation:
National Institute of Biomedical Imaging and Bioengineering, NIH, Bethesda, USA.
D.C. Joy
Affiliation:
Department of Materials Science and Engineering, University of Tennessee, Knoxville, USA. Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, USA.
G. Zhang
Affiliation:
National Institute of Biomedical Imaging and Bioengineering, NIH, Bethesda, USA.
R.D. Leapman
Affiliation:
National Institute of Biomedical Imaging and Bioengineering, NIH, Bethesda, USA.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 1440 - 1441
Copyright
© Microscopy Society of America 2018 

References

[1] Hennig, P. Denk, W. J. Appl. Phys. 102 2007) p. 123101.Google Scholar
[2] Boughorbel, F., et al Compnay, FEI US Patent (#US8,232,523 B2) 2011.Google Scholar
[3] Demers, H., et al, Scanning 33 2011) p. 135.Google Scholar
[4] This research was supported by the intramural program of the National Institute of Biomedical Imaging and Bioengineering, National Institutes of Health.Google Scholar