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In situ Micro-pyrolysis of 3D Nano-printed Electron Beam Sensitive Metamaterials

Published online by Cambridge University Press:  03 December 2021

Qing Sun
Affiliation:
Microscopy of Nanoscale Structures & Mechanisms (MNM), Laboratory for Electron Microscopy (LEM), Karlsruhe Institute of Technology (KIT), Karlsruhe, Germany.
Christian Dolle
Affiliation:
Microscopy of Nanoscale Structures & Mechanisms (MNM), Laboratory for Electron Microscopy (LEM), Karlsruhe Institute of Technology (KIT), Karlsruhe, Germany.
Chantal Kurpiers
Affiliation:
Institute for Applied Materials, Karlsruhe Institute of Technology, Karlsruhe, Germany
Ruth Schwaiger
Affiliation:
Institute of Energy and Climate Research, Forschungszentrum Jülich GmbH, Jülich, Germany
Peter Gumbsch
Affiliation:
Institute for Applied Materials, Karlsruhe Institute of Technology, Karlsruhe, Germany Fraunhofer Institute for Mechanics of Materials IWM, Freiburg, Germany
Yolita M. Eggeler
Affiliation:
Microscopy of Nanoscale Structures & Mechanisms (MNM), Laboratory for Electron Microscopy (LEM), Karlsruhe Institute of Technology (KIT), Karlsruhe, Germany.

Abstract

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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

References:

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Bauer, J et al. , Nat. Mater. 15 (2016), p. 438.CrossRefGoogle Scholar
Jiang, S et al. , J. Micromech. Microeng. 25 (2015), p. 113001.Google Scholar
Liu, Y et al. , Nat. Commun. 10 (2019), p. 4340.Google Scholar
All authors gratefully acknowledge funding by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany's Excellence Strategy 2082/1 390761711 and sincerely thank the Carl Zeiss Foundation for financial support.Google Scholar