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“Indirect” High-Resolution Transmission Electron Microscopy: Aberration Measurement and Wavefunction Reconstruction

Published online by Cambridge University Press:  01 August 2004

Angus I. Kirkland  and
Rüdiger R. Meyer
Angus I. Kirkland
Affiliation:
University of Oxford, Department of Materials, Parks Road, Oxford OX1 3PH, UK
Rüdiger R. Meyer
Affiliation:
University of Oxford, Department of Materials, Parks Road, Oxford OX1 3PH, UK
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Abstract

Improvements in instrumentation and image processing techniques mean that methods involving reconstruction of focal or beam-tilt series of images are now realizing the promise they have long offered. This indirect approach recovers both the phase and the modulus of the specimen exit plane wave function and can extend the interpretable resolution. However, such reconstructions require the a posteriori determination of the objective lens aberrations, including the actual beam tilt, defocus, and twofold and threefold astigmatism. In this review, we outline the theory behind exit plane wavefunction reconstruction and describe methods for the accurate and automated determination of the required coefficients of the wave aberration function. Finally, recent applications of indirect reconstruction in the structural analysis of complex oxides are presented.

Keywords

high resolution electron microscopyimage reconstructionaberration measurement
Type
Review Paper
Information
Microscopy and Microanalysis , Volume 10 , Issue 4 , August 2004 , pp. 401 - 413
Copyright
© 2004 Microscopy Society of America

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References

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