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The Influence of Beam Convergence Angle on Channeling Effect during STEM/EDS Quantification of SiGe Concentration
Published online by Cambridge University Press: 25 July 2016
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- Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 1618 - 1619
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- © Microscopy Society of America 2016
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[5] The authors are grateful to Pavel Potapov for his insightful discussions.Google Scholar
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