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Influence of ion beam damage by FIB on the RESET amorphous volume observation in phase change random access memory device

Published online by Cambridge University Press:  09 October 2013

J. Oh ,
Y. Jang ,
S. Jeon ,
T. Lee ,
W. Kim ,
H. Kim  and
C. Kim
J. Oh
Affiliation:
Y. Jang
Affiliation:
S. Jeon
Affiliation:
T. Lee
Affiliation:
W. Kim
Affiliation:
H. Kim
Affiliation:
C. Kim
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 19 , Issue S2: Proceedings of Microscopy & Microanalysis 2013 , August 2013 , pp. 1850 - 1851
Copyright
Copyright © Microscopy Society of America 2013