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In-Situ EBIC STEM: Automated Quantification

Published online by Cambridge University Press:  22 July 2022

Grigore Moldovan
Affiliation:
point electronic GmbH, Halle (Saale), Saxony-Anhalt, Germany
Aidan P. Conlan*
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France
David Cooper
Affiliation:
Univ. Grenoble Alpes, CEA, LETI, Grenoble, France
*

Abstract

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Type
Quantum Materials Under Electron Beam: From Atomic Structures to Working Devices
Copyright
Copyright © Microscopy Society of America 2022

References

Leamy, H, J. Appl. Phys. 53(6) (1982)CrossRefGoogle Scholar
Marcelot, Maximenko, Magnan, IEEE 61 (2014)Google Scholar
Yakimov, EB, et al. , J. Appl. Phys. 123 (2018), p. 161543.Google Scholar
Han, MG et al. , Ultramicroscopy 176 (2017), p. 80.CrossRefGoogle Scholar
Hubbard, WA, et al., Phys. Rev. Applied 10 (2018), p. 044066CrossRefGoogle Scholar
Moldovan, G and Zabel, M, Microscopy and Microanalysis 26(S2) (2020)CrossRefGoogle Scholar
Conlan, AP, et al. , J. Appl. Phys. 129 (2021), p. 135701CrossRefGoogle Scholar
The authors acknowledge financial support of the Cross-Disciplinary Program on Instrumentation and Detection of CEA, and “Recherches Technologiques de Base” Program of the French Ministry of Research.Google Scholar