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Integrating 3D Surface Imaging with FIB/SEM Microscopy

Published online by Cambridge University Press:  27 August 2014

B Volbert ,
G Renka ,
K Schock ,
A Lieb ,
M Dadras  and
S Kleindiek
B Volbert
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
G Renka
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
K Schock
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
A Lieb
Affiliation:
Nanosurf AG, Liestal, Switzerland
M Dadras
Affiliation:
Centre Suisse d’Électronique et de Microtechnique, Neuchâtel, Switzerland
S Kleindiek
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 2066 - 2067
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Walters, DA Appl. Phys. Lett. 65 (1994) p. 787.Google Scholar
[2] Stahl, U, Yuan, CW AL de Lozanne, M Tortonese, Appl. Phys. Lett. 68 (1994) p. 2878.Google Scholar
[3] Fukushima, K, Saya, D, Kawakatsu, H Jpn. J. Appl. Phys. 39 (2000) p. 3747.Google Scholar
[4] Altes, A, Joachimsthaler, I, Zimmermann, G, Heiderhoff, R Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA (2002) p. 196.Google Scholar