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Integrating Atomic Force Microscopy in Scanning Electron Microscopy

Published online by Cambridge University Press:  23 September 2015

Andrew J. Smith ,
Klaus Schock ,
Gregor Renka ,
Andreas Lieb ,
Massoud Dadras  and
Stephan Kleindiek
Andrew J. Smith
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Klaus Schock
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Gregor Renka
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Andreas Lieb
Affiliation:
Nanosurf AG, Gräubernstrasse 12–14, 4410 Liestal, Switzerland
Massoud Dadras
Affiliation:
Centre Suisse d’Électronique et de Microtechnique, CSEM SA, Neuchâtel, Switzerland
Stephan Kleindiek
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany

Abstract

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Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1435 - 1436
Copyright
Copyright © Microscopy Society of America 2015