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Metallurgical Sample Surface Cleaning Using UV/Ozone

Published online by Cambridge University Press:  01 August 2010

P Woo  and
D Hoyle
P Woo
Affiliation:
Hitachi High-Technologies Canada Inc, Canada
D Hoyle
Affiliation:
Hitachi High-Technologies Canada Inc, Canada

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 686 - 687
Copyright
Copyright © Microscopy Society of America 2010