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Microstructure of Thick Polycrystalline Silicon Films for MEMS Application

Published online by Cambridge University Press:  01 August 2002

H.W. Zhou ,
B.G. Kharas  and
P.I. Gouma
H.W. Zhou
Affiliation:
Dept. of Materials Science and Engineering, State University of New York at Stony Brook, NY 11794
B.G. Kharas
Affiliation:
Standard MEMS, Inc., 35 Marcus Boulevard, Hauppauge, NY 11788
P.I. Gouma
Affiliation:
Dept. of Materials Science and Engineering, State University of New York at Stony Brook, NY 11794

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 666 - 667
Copyright
Copyright © Microscopy Society of America 2002