Minimization of Ga Induced FIB Damage Using Low Energy Clean-up

K Thompson; B Gorman; D Larson; B van Leer; L Hong

doi:10.1017/S1431927606065457

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

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Minimization of Ga Induced FIB Damage Using Low Energy Clean-up

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