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Model “Alloy” Specimens for MEMS-Based Closed-Cell Gas-Reactions

Published online by Cambridge University Press:  04 August 2017

Lawrence F. Allard
Affiliation:
Materials Science & Technology Div., Oak Ridge National Laboratory, Oak Ridge, TN, USA.
Harry M. Meyer III
Affiliation:
Materials Science & Technology Div., Oak Ridge National Laboratory, Oak Ridge, TN, USA.
Dale K. Hensley
Affiliation:
Center for Nanophase Materials Sciences, Oak Ridge National Laboratory, Oak Ridge, TN, USA.
Wilbur C. Bigelow
Affiliation:
Department of Materials Science & Engineering, University of Michigan, Ann Arbor, MI, USA.
Kinga A. Unocic
Affiliation:
Materials Science & Technology Div., Oak Ridge National Laboratory, Oak Ridge, TN, USA.

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2017 

References

[1] Allard, L.F., et al, Microsc. Microanal 18 2012 656666.CrossRefGoogle Scholar
[2] Creemer, J.F., et al, J. Microelectromechanical Systems 19(2 2010 254264.CrossRefGoogle Scholar
[3] Duchamp, M., Xu, Q. & Dunin-Borkowski, R.E. Microsc. Microanal 20(6 2014 16381645.CrossRefGoogle Scholar
[4] Unocic, K A, et al, Oxid. Metals 2017). p. l.Google Scholar
[5] Research sponsored by the Laboratory Directed Research and Development program, ORNL, managed by UT-Battelle LLC for the US Department of Energy.Google Scholar