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Modern STEM EBIC: Emerging Modes and Methods
Published online by Cambridge University Press: 30 July 2021
Abstract
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- Type
- Advanced Imaging and Spectroscopy for Nanoscale Materials Characterization
- Information
- Copyright
- Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America
References
Everhart, TE, Wells, OC, and Matta, RK, Proceedings of the IEEE, 52 (1964). p. 1642–1647CrossRefGoogle Scholar
This material is based upon work supported by the Defense Microelectronic Activity under Contract No. HQ072720P0004, and by NSF STC award DMR-1548924 (STROBE), NSF award DMR-2004897, the UCLA PSEIF, and award 70NANB20H117 from NIST, U.S. Dept. of Commerce.Google Scholar