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Nanolithograhpy Using Tip-Sample Material Transport Process

Published online by Cambridge University Press:  30 December 2005

M. I. N. da Silva
Affiliation:
Departamento de Física UFMG, Campus da Pampulha, Av. António Carlos
B. R. A. Neves
Affiliation:
Departamento de Física UFMG, Campus da Pampulha, Av. António Carlos
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Extract

Scanning Probe Microscopy (SPM) [1] has been an important tool to organize matter on the nanometer scale. It has been proved to be a powerful tool not only for imaging but also for nanofabrication. SPM-based nanofabrication comprises manipulation of atoms or molecules and SPM-based nanolithography. SPM-based nanolithography, referred to as scanning probe lithography (SPL) holds good promise for fabrication of nanometer-scale patterns as an emerging generic lithography technique that employs SPM to directly pattern nanometer-scale features under appropriate conditions. The water meniscus formation between the tip and the flat substrate, due to the water layer present on any surface of a material at ambient conditions, has been studied experimentally and theoretically [2-6] using SPM techniques. The water effect in the imaging process is well understood [2, 4, 6-8]. Dip pen nanolithogaphy (DPN) [9] is one example of a technique that uses the water effect to transfer material from the tip onto sample surface in direct-write fashion with nanoscopic resolution.

Type
Other
Copyright
© 2005 Microscopy Society of America

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