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New Atom Probe Tomography Reconstruction Algorithm for Multilayered Samples: Beyond the Hemispherical Constraint

Published online by Cambridge University Press:  22 March 2017

Nicolas Rolland ,
François Vurpillot ,
Sébastien Duguay ,
Baishakhi Mazumder ,
James S. Speck  and
Didier Blavette
Nicolas Rolland*
Affiliation:
Groupe de Physique des Matériaux, Université et INSA de Rouen-UMR CNRS 6634-Normandie Université, 76801 St Etienne du Rouvray, France
François Vurpillot
Affiliation:
Groupe de Physique des Matériaux, Université et INSA de Rouen-UMR CNRS 6634-Normandie Université, 76801 St Etienne du Rouvray, France
Sébastien Duguay
Affiliation:
Groupe de Physique des Matériaux, Université et INSA de Rouen-UMR CNRS 6634-Normandie Université, 76801 St Etienne du Rouvray, France
Baishakhi Mazumder
Affiliation:
Department of Material Design and Innovation, University at Buffalo, Buffalo, NY 14260, USA
James S. Speck
Affiliation:
Materials Department, University of California, Santa Barbara, CA 93106, USA
Didier Blavette
Affiliation:
Groupe de Physique des Matériaux, Université et INSA de Rouen-UMR CNRS 6634-Normandie Université, 76801 St Etienne du Rouvray, France
*
*Corresponding author. Nicolas.rolland1@univ-rouen.fr
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Abstract

Accuracy of atom probe tomography measurements is strongly degraded by the presence of phases that have different evaporation fields. In particular, when there are perpendicular interfaces to the tip axis in the specimen, layers thicknesses are systematically biased and the resolution is degraded near the interfaces. Based on an analytical model of field evaporated emitter end-form, a new algorithm dedicated to the 3D reconstruction of multilayered samples was developed. Simulations of field evaporation of bilayer were performed to evaluate the effectiveness of the new algorithm. Compared to the standard state-of-the-art reconstruction methods, the present approach provides much more accurate analyzed volume, and the resolution is clearly improved near the interface. The ability of the algorithm to handle experimental data was also demonstrated. It is shown that the standard algorithm applied to the same data can commit an error on the layers thicknesses up to a factor 2. This new method is not constrained by the classical hemispherical specimen shape assumption.

Keywords

atom probe tomography3D reconstructionmultilayersfield evaporationsimulation
Type
Reconstruction
Information
Microscopy and Microanalysis , Volume 23 , Special Issue 2: Atom Probe Tomography & Microscopy 2016 , April 2017 , pp. 247 - 254
Copyright
© Microscopy Society of America 2017 

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