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A New Method for the XEDS ζ-factor Measurement Through Modulation of Beam Current.

Published online by Cambridge University Press:  30 July 2021

Richard Webster ,
Shery Chang  and
Richard Tilley
Richard Webster
Affiliation:
Electron Microscope Unit, UNSW, Sydney, New South Wales, Australia
Shery Chang
Affiliation:
Electron Microscope Unit, UNSW, Sydney, New South Wales, Australia
Richard Tilley
Affiliation:
Electron Microscope Unit, UNSW, Sydney, New South Wales, Australia

Abstract

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Type
Unresolved Challenges in Quantitative X-ray Microanalysis
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 2064 - 2067
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Watanabe, M and Williams, D (2006) The quantitative analysis of thin specimens: a review of progress from the Cliff-Lorimer to the new ζ-factor methods, Journal of Microscopy 221, 2, 89-109 https://doi.org/10.1111/j.1365-2818.2006.01549.xCrossRefGoogle Scholar
Barabino, Edoardo, Withaar, Thijs and Freitag, Bert (2018) Systematic Error Determination of ζ-Factor Quantification in XEDS Analysis Microsc. Microanal. 24 (Suppl 1) https://doi.org/10.1017/S143192761800435XGoogle Scholar
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