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Optimization of High Current Xenon Plasma Ion Beams for Applications in Semiconductor Failure Analysis and Development

Published online by Cambridge University Press:  27 August 2014

Srinivas Subramaniam  and
Kevin Johnson
Srinivas Subramaniam
Affiliation:
Intel Corporation, Hillsboro, USA
Kevin Johnson
Affiliation:
Intel Corporation, Hillsboro, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 296 - 297
Copyright
Copyright © Microscopy Society of America 2014 

References

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